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Short tubes with diameters of the order of 200nm were drilled into silicon nitride (Si 3 N 4 ) membranes of 200nm thickness by focused ion beam technology and examined as leak elements for vacuum technology applications. These nano-holes exhibit molecular flow in the pressure range from high vacuum up to 10kPa and can therefore be used as predictable leak elements for any non-condensable...
Time-dependent flows of single gases and binary gas mixtures with various molar fractions from a chamber through a short tube into vacuum are examined by simulations and experiments. The main goal is the comparison of the flow behaviour between pure gases and binary mixtures including the investigation of the gas separation effect. The simulations are based on an explicit hybrid scheme, coupling at...
The ultimate pressure in the XHV calibration chamber of the PTB primary standard CE3, whose operation is based on the continuous expansion of gas, has been reduced by the use of a relatively large orifice area. Thus, the gas density and flux distributions cannot be taken as uniform in the calibration chamber. To eliminate this drawback we examined the gas flux distribution by Direct Simulation using...
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