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For the first time, 4Gbit density STT-MRAM using perpendicular MTJ in compact cell was successfully demonstrated through the tight distributions for resistance and magnetic properties. This paper includes the results regarding parasitic resistance control process, MTJ process, and MTJ stack engineering. Both of successful 4Gb read and write operations were performed with high TMR, low Ic. This result...
This paper describes the high-performance CPU design of a heterogeneous octa-core CPU complex, incorporated into a highly integrated mobile SoC for smartphone applications. The SoC is fabricated in a 28nm high-x metal-gate CMOS, and has a die size of 89mm2. Cu pillars are used for the die-to-substrate interface with fine substrate trace pitch. The SoC is packaged in a 14mmx14mm, 832 ball, 0.4mm pitch...
We present a Pulsed Laser Activated Cell Sorter (PLACS) integrated with 3D sheathless inertial focusing that is capable to sort at 10,000 particles sec−1 with >90% sort purity and 6,000 cells sec−1 with >80% sort purity. It is realized by exciting laser induced cavitation bubbles in a single layer PDMS microfluidic channel to create high speed liquid jets to deflect detected fluorescent samples...
This paper presents Single Pole Double Throw (SP2T) and Single Pole Four Throw (SP4T) switches using piezoelectric micro-electro-mechanical (MEMS) switches measured from DC to 50 GHz. The overall performance of the switches shows better than 20 dB isolation up to 50 GHz when the MEMS switches are in the off or zero volt state. When the switches are actuated with 7 V, the SP2T shows less than 1.8 dB...
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