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Surface micro/nanohierarchical structure designing and thin film lubrication are two main methods to alleviate adhesive and frictional problems encountered by micro/nanoelectromechanical systems (MEMS/NEMS). In this study, silicon surfaces with micro/nano grooves were prepared by photolithography and further chemically modified by multiply-alkylated cyclopentane (MAC) thin films to improve the tribological...
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