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A wireless sub-mm3 FBAR-based mass sensor fully integrated in a hermetic package is demonstrated. We propose a wafer-scale commercially viable manufacturing process for the integration of the sensor and the interface circuitry. The drift in frequency of the FBAR sensor due to temperature, aging and stress is reduced by a factor of 10 through an integrated differential measurement. The sensor achieves...
A kind of environmental monitoring system based on wireless mesh network with the core of embedded system ARM9 S3C2410 microprocessor is presented in the paper. The flexible and self-organizing wireless mesh network is used to achieve the real time acquisition and multi-hop wireless communication of parameters of the monitoring atmospheric environment such as SO2, NO2, NO, temperature, humidity and...
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