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Multilayered TiN/ZrN coatings were deposited using sequential vacuum-arc deposition of Ti and Zr targets in a nitrogen atmosphere. Studies of film's properties were done using various modern methods of analysis, such as XRD, STEM, HRTEM, SIMS. Several samples were annealed in air at the temperature 700°C. All deposited samples were highly polycrystalline with large 7–17 nm crystals. The crystalline...
Przedstawiono wyniki prac badawczych dotyczących zastosowania nowo opracowanego spektrometrycznego analizatora wyładowania jarzeniowego (typ SMWJ-01) do analizy profilowej układów warstwowych. Jako układy testowe badano cienkie warstwy azotków tytanu i chromu nanoszone metodą plazmową na powierzchnię stali. W trakcie analizy powierzchnia badanych próbek ulega trawieniu jonowemu w obszarze wyładowania...
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