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Various effects of annealing on the optical and structural properties of sputtered ZnO layers have been investigated. ZnO layers were sputtered on Si (111) substrates and annealed at 700–900°C under H 2 O atmosphere. Optical and structural properties along with surface morphologies were estimated by using photoluminescence (PL), X-ray diffraction (XRD), and atomic force microscopy (AFM), respectively...
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