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In this letter, supercritical CO2 (SCCO2) fluids technology is employed for the first time to effectively passivate the defect states in hydrogenated amorphous-silicon thin-film transistors (a-Si:H TFTs) at low temperature (150degC ). With the high transport and diffusion properties of fluids, it is proposed to act as a transporter in delivering the molecules into the amorphous-silicon film and repairing...
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