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Computational fluid dynamics (CFD) was employed to investigate the effects of electrode architecture, the arrangement of multi-hollows on the surface of the porous electrode, electrode distance and gas flow rate on the distribution of SiH 3 molar fraction. A two-dimensional laminar flow coupled with heat transfer, multi-species chemistry are simultaneously calculated through CFD for improving...
In this paper, p-type hydrogenated nanocrystalline (nc-Si:H) films were prepared on corning 7059 glass by plasma-enhanced chemical vapor deposition (PECVD) system. The films were deposited with radio frequency (RF) (13.56 MHz) power and direct current (DC) biases stimulation conditions. Borane (B 2 H 6 ) was a doping agent, and the flow ratio η of B 2 H 6 component...
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