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SrHfON thin films were deposited on Si substrate by radio frequency (RF) magnetron reactive sputtering. Composition, structure and optical properties of the SrHfON films in relation to rapid thermal annealing (RTA) temperatures were analyzed by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and spectroscopic ellipsometry (SE). The XPS analysis indicates that the peaks of Sr 3d, Hf...
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