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As a fluid power source for practical micromachines using fluid power such as in-pipe mobile micromachines, micropumps having high power density are required. In this paper, a piezoelectric micropump using resonance drive is fabricated with the size of φ 9x10<space>mm. It basically consists of a bellows as a flexible pump chamber, a piezoelectric actuator for oscillating the bellows, and cantilever...
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