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Periodic pyramid and random nanostructure binary structures of single-crystal silicon wafer was fabricated by chemical etching method. Much lower reflectance of silicon wafer with these structures was obtained compared with that of single pyramid arrays. The morphology and reflectivity of these structures, as well as the influence on nanostructures caused by rapid thermal annealing (RTA) time and...
Periodic structures are of increasing interest in many fields such as nanotechnology and biotechnology among others. Laser Interference Lithography (LIL) has been widely studied for the fabrication of periodic structures. However, a LIL tool for the nanoscale structuring of materials that can scale beyond laboratory prototypes into cost effective industrial processes is not yet defined. In this work,...
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