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High-quality ZnO thin film was grown on (0001) sapphire substrate with a ZnO buffer layer by hydrothermal method under atmospheric pressure. The flat surface of the ZnO film was observed by SEM, and the wurtzite crystalline structure and preferred (0001) orientation of the ZnO film was observed by X-ray diffraction. Raman scattering and photoluminescence verified low density of impurities and defects...
Indium–zinc–lithium–oxygen (IZLO) thin film was produced by radio frequency magnetron sputtering, and the electronic properties of the TFT were investigated. The X-ray diffraction spectroscopy showed that IZLO film contains different Zn k In 2 O k+3 phases. Using this film as the channel layer, we fabricated a bottom gate thin film transistor (TFT), which exhibited n-channel...
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