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A two-dimensional (2D) simulator that integrates aerial image simulation two-dimensional (2D) simulator that integrates aerial image simulation module, exposure simulation module, post-exposure bake (PEB) simulation module and development simulation module is presented for the deep UV lithography of thick photoresists such as SU-8 photoresists. A method based on Fresnel diffraction is developed to...
This paper, for the first time, presents the accurate results of coupled fabrication process simulation and mechanical performance analysis of microstructures using cellular automata (CA) method. According to the process sequences and process parameters, the microstructures are accurately generated using the CA method. The mechanical performance of the microstructures obtained is then analyzed using...
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