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The presence of cracks on the surface of MEMS microelectromechanical system (MEMS) devices affects their functional parameter, such as resonance frequency. Overtime, these cracks may cause the devices’ failure. Therefore, it is important to identify the symptoms of the cracks presence so that the affected devices can be removed/bin-out before delivering to the customers thus avoiding failure during...
Recently, there has been a growing interest in the research community about using wrist-worn devices, such as smartwatches for human activity recognition, since these devices are equipped with various sensors such as an accelerometer and a gyroscope. Similarly, smartphones are already being used for activity recognition. In this paper, we study the fusion of a wrist-worn device (smartwatch) and a...
This paper presents new investigations to improve dynamic behavior of electrostatic cantilever based MEMS sensors by reducing pull-in voltage nonlinearity. It is believe that pull-in voltage is one of the major factors to generate pull-in force that induces parasitic pull-in frequency as a result the behavior of MEMS sensor become nonlinear. The dynamic behavior of the device is modeled under the...
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