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In order to enable electrode sites to get closer to target neurons, obtain a better stimulation and minimize the electrochemical erosion of electrode, we proposed dome-shaped flexible neural microelectrode arrays (MEAs) for neural applications. With the use of photosensitive polyimide (Durimide 7510, PI) as substrate, a flexible microelectrode with 6 × 6 array of dome-shaped electrode sites was fabricated...
Microelectrode arrays (MEAs) have become key components in retinal implants for recording of neural signals or electrical stimulation of nerves. In this paper, implantable flexible MEAs based on a novel polymer, parylene, were developed by designing MEMS process. And electrical performance of prepared microelectrodes was characterized electrochemically. Results showed that impedance and phase delay...
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