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The first trial of Mg doping in the atmospheric-pressure MOVPE growth of InN has been made using CP 2 Mg as a Mg source. Although Mg is incorporated in the InN films and its content is proportional to CP 2 Mg/TMI molar ratio, all samples grown here show n-type conduction and the electron concentration is rather increased with increasing CP 2 Mg/TMI molar ratio. The SIMS analysis...
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