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As very large scale integration (VLSI) technology advances to smaller and smaller nodes, certain layout configurations tend to have reduced yield and/or reliability during manufacturing processes because of increased susceptibility to stress effects or poor tolerance to certain processes like lithography. Such layout configurations are called process-hotspots, which are represented here accurately...
In current manufacturing processes, certain layout configurations are likely to have reduced yield and/or reliability due to increased susceptibility to stress effects or poor tolerance to certain processes like lithography. These problematic layout configurations need to be efficiently detected and eliminated from a design layout to enable better yield. In this paper, such layout configurations are...
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