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A 3-D mechanically-coupled resonator array has been demonstrated for the first time using CMOS-MEMS technology. A high-performance vertically-coupled (VC) CMOS-MEMS resonator pair was utilized to extend the array topology into 3-D configuration with an on-chip interfaced circuit through a TSMC 0.35 μm 2P4M CMOS-MEMS platform. An array design of 9 VC pairs (N = 18 where N is the number of constituent...
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