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In this paper, a novel design of diaphragm based pressure sensor has been proposed, which may find its application in Intra Uterine Pressure Catheter (IUPC) system. The novelty of the device lies in the fact that it has got patterned slots over the top layer of the diaphragm similar to a chess-board pattern. This sensor is then compared with a plane diaphragm of same dimensions. In same range of input...
Surface geometry plays an important role in case of analyte sensing and RF switching using beams and electrodes. In general, rather than simply supported beam and diaphragm, microcantilever beams are widely preferred in BIO-MEMS and RF-MEMS for biosensing and RF switching, respectively. The lower level detection ability and simple structure make these cantilevers more applicable in many applications...
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