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The fabrication process and characterization results of a single element capacitive micromachined ultrasonic transducer (CMUT) are presented in this paper. The fabrication process is based on polymer adhesive wafer bonding of silicon and low pressure chemical vapor deposited silicon nitride wafers. The fabricated transducer has an average resonant frequency of 5.5 MHz in air. In immersion, the transmitted...
Row–column addressed arrays for ultrasonic non-destructive testing (NDT) applications are analyzed and demonstrated in this paper. Simulation and experimental results of a row–column addressed 32 by 32 capacitive micromachined ultrasonic transducer (CMUT) array are presented. The CMUT array, which was designed for medical imaging applications, has a center frequency of 5.3MHz. The CMUT array was used...
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