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A novel bismuth zinc niobate (Bi1.5Zn1.0Nb1.5O7, BZN) thin film was studied as an embedded capacitor. The BZN thin films were prepared on copper based substrate by RF sputtering, which is compatible with low-temperature PCB processing. The films without any heat treatment were composed of an amorphous phase. Dielectric properties of the BZN thin films measured using Au/BZN/Cu structure were strongly...
The BZN thin films on copper clad laminate substrate by RF sputtering were studied for embedded capacitor application in PCB. The deposition was performed without substrate heating and the deposited films are composed of an amorphous phase. The dielectric properties of BZN thin films were dependent on the deposition parameters. The dielectric constant of the BZN thin films decreases with oxygen addition...
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