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Waveguide based 1-D photonic crystal (PC) microcavities in silicon-on-insulator are investigated by 2-D finite-difference time-domain method. Values up to 6.7 times106 for the quality factor (Q) are feasible if the cavities are properly designed. The factors that govern Q are analyzed in both real space and momentum space. Etching down into the SiO2 layer is found to give more than 20% improvement...
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