The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
The reliability of MEMS switches is closely linked to their operational and environmental conditions. This paper reports on the investigation of the actuated voltage shift mechanism in MEMS capacitive switch for millimeter-wave phase shifter design. Considering the dielectric charging and polarization effects on capacitive MEMS switch with silicon nitride as dielectric layer, an accurate model of...
A novel low-driven MEMS capacitive switch structure for microwave distributed phase shifter is presented based on the analysis of the operation principle. The driven voltage, response time, release time and vibration modes of the capacitive switch are analyzed using the Intellisuitetrade software. The simulation results show the driven voltage of 2.5 V, the response time less than 30 us, the release...
A numerical analytical method based on multi-mode Galerkin discretization is presented to investigate the nonlinear response of the clamped-clamped microbeam of the MEMS capacitive switch under the different mechanical shock loads. The results show that using five or more modes can be sufficient to capture the nonlinear dynamic response of clamped-clamped microbeam, and the microbeam experiences a...
The MEMS capacitive switch based on fixed-fixed microbeam have garnered significant attention due to their geometric simplicity and broad applicability, and the accurate models should be developed to predict their electromechanical behaviors. The improved macromodel of the fixed-fixed microbeam of MEMS capacitive switch is presented in this paper, the numerical analysis of mechanical characterizations...
This paper reports on design and analysis of electrostatic driven RF MEMS capacitive switches for radio-frequency (RF) applications. To reduce the driven voltage of MEMS switches, the mechanical designs of low spring-constant hinge shape beam structure are presented. The displacement distribution, driven voltage and mechanical vibration modes of the switch using the beam are analyzed by using IntelliSuitetrade...
In this paper, a novel method for analyzing the switching time of the electrostatic driven RF MEMS capacitive switches is presented. The effects of the structure parameters which mainly include the width, length and thickness and stress for capacitive switches MEMS bridge on time response are investigated using the SYNPLE module of IntelliSuitetrade tool. The result shows that the width of MEMS bridge...
This paper reports on the methods, feedthrough modes and RF performance of wafer level packaging for RF MEMS switches. By analyzing the effects of packaging methods and feedthrough modes on the cost, weight, size, loss, RF performance and function of switches, a novel wafer level packaging structure which is performed using the wafer-level microencapsulation on the thin silicon substrate as the RF...
In this paper, a novel low spring constant hinge beam structure is presented in order to reduce the driven-voltage of switch. The mechanical behaviors of switches are investigated using the IntelliSuiteTM tool. The simulation results show that the driven voltage of 2.5V and the time response of 30us are obtained respectively. Moreover, the frequencies of all mechanical vibrant modes of beam are higher...
This paper analyzes the effects of the materials, the driven voltage, the switch height, the width of the CPW signal line and the quality factor on the switching time and the dynamic behavior of electrostatic driven RF MEMS capacitive switches for the microwave distributed MEMS shifters to reduce the switching time and the impact velocity, and increase the capacitive ratio
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.