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The SrTiO3 (001) substrates treated by chemical etching in NH4F-buffered HF solution and annealing in oxygen ambient have been studied by an atomic force microscopy (AFM). The SrTiO3 substrates with TiO2-termineted and atomically smooth surfaces and single unit cell steps have been obtained. The surface morphologies of SrTiO3 substrates strongly depend on the treated conditions and the quality of...
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