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In this study, indium–zinc oxide (IZO) films of different compositions were deposited on quartz glass by alternate sputtering of ZnO:Al and In2O3:Sn targets at room temperature. Spectroscopic ellipsometry (SE) measurements were carried out over the wavelength range 193–1690nm in order to estimate the chemical, optical, and electrical properties of the IZO films using various dispersion models, i.e...
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