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Tungsten nitride layers, 1.45-μm-thick, were deposited by reactive magnetron sputtering on MgO(001), MgO(111), and Al2O3(0001) in 20mTorr N2 at 700°C. X-ray diffraction ω-2θ scans, ω-rocking curves, φ scans, and reciprocal space maps show that all layers exhibit a cubic rock salt structure, independent of their N-to-W ratio which ranges from x=0.83–0.93, as determined by energy dispersive and photoelectron...
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