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Kinetic Monte Carlo (KMC) simulations have been used for electron beam physical vapor deposition (EB‐PVD) of ZrO2 coatings, with the critical potential function fitted by full first‐principles calculations in the framework of density functional theory, emphasizing the effect of critical processing parameters, for example, the substrate temperature (600–1150 K), deposition rate (0.03–7.5 μm/min), and...
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