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Copper films were grown on clean Si, SiO 2 and 3-amino-propyl-trimethoxy-silane (APTMS) self-assembled monolayers (SAMs)-modified SiO 2 substrates via chemical vapor deposition (CVD) and were examined using scanning electron microscopy, atomic force microscopy, and X-ray diffraction (XRD). Ordered APTMS-SAMs obtained from a 3 mM concentration solution were found to enhance adhesion...
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