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A new type of MEMS two axis accelerometer based on silicon is presented in this paper. This kind of sensor consists of four vertical cantilever beams with an attached cylinder in the center of the structure. By locating the resistors logically formed the Wheatstone bridge; this sensor can detect acceleration in two direction. It is desirable that the application of ingenious structure of the accelerometer...
Presented in this paper, is a MEMS-based piezoresistive vector hydrophone. It is desirable that the application of piezoresistive effect and ingenious structure of the hydrophone may improve the low-frequency sensitivity of vector hydrophone as well as its miniaturization. The structure of this hydrophone consists of two parts: high-precision four-beam micro-structure and rigidity plastic cylinder...
This paper presents a GaAs piezoresistive accelerometer based on the GaAs/AlAs Resonant Tunneling Diode (RTD). As the sensing unit, the resonant tunneling thin films are designed and integrated on the cantilever. In order to decrease the parasitic capacitance and control the thickness of the cantilever accurately, RTD and seismic mass are successfully fabricated by airbridge and control hole technique...
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