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A SiO2 quad-cantilever micro-sensor with a self-sensing piezoresistor integrated is developed for on-the-spot chemical detection. Four piezoresistors are integrated in four cantilevers and the sensing signal is outputted from a half-sensitive Wheatstone bridge. The new single-sided micromachining process features low-cost and high-yield. Modified with a novel self-assembled monolayer (SAM) on two...
The paper reports a novel static cantilever sensor (surface-stress-style) with long-term repeatable detecting sensitivity to trace TNT vapor. A siloxane-based TNT-sensitive bi-layer is self-assembled directly on the SiO2 surface of the surface-stress-style micro-cantilever. This method is, for the first time, used to replace the traditional self-assembled monolayers (SAMs) of thiols on Au (111) surface...
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