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Reported is a surface-stress sensing microcantilever with signal readout piezoresistor encapsulated by electrically insulated SiO2 for detecting bio/chemical molecules in liquid. Specifically sensitive siloxane-based molecule monolayers or bi-layer is directly modified on the SiO2 surface via reliable Si-O covalent bond that secures sensitivity stability and long-life working of the sensor. The sensors...
A SiO2 quad-cantilever micro-sensor with a self-sensing piezoresistor integrated is developed for on-the-spot chemical detection. Four piezoresistors are integrated in four cantilevers and the sensing signal is outputted from a half-sensitive Wheatstone bridge. The new single-sided micromachining process features low-cost and high-yield. Modified with a novel self-assembled monolayer (SAM) on two...
The paper reports a novel static cantilever sensor (surface-stress-style) with long-term repeatable detecting sensitivity to trace TNT vapor. A siloxane-based TNT-sensitive bi-layer is self-assembled directly on the SiO2 surface of the surface-stress-style micro-cantilever. This method is, for the first time, used to replace the traditional self-assembled monolayers (SAMs) of thiols on Au (111) surface...
Presented is an ultra-sensitive piezoresistive SiO2 microcantilever sensor for trace TNT detection. A thin single crystalline silicon piezoresistor is encapsulated in a SiO2 cantilever for on-chip electric readout. The cantilever can lead to a more sensitive characteristic compared with conventional silicon cantilever because of a much lower Young's modulus of SiO2. Moreover, fully covered by SiO2...
Presented is a new micromachining technology for high-yield fabrication of silicon AFM probes. Both tips and cantilevers are simultaneously formed with a masked-maskless-combined anisotropic etching process. The cantilever contour is firstly formed by masked etching. Then, the SiO2 etching mask is removed while the mask for tip-contour formation is remained. Following the combined etching is performed...
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