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Reported is a surface-stress sensing microcantilever with signal readout piezoresistor encapsulated by electrically insulated SiO2 for detecting bio/chemical molecules in liquid. Specifically sensitive siloxane-based molecule monolayers or bi-layer is directly modified on the SiO2 surface via reliable Si-O covalent bond that secures sensitivity stability and long-life working of the sensor. The sensors...
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