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This paper proposes efficient control method to minimize process error and to reduce process variance in semiconductor manufacturing. Photo-lithography process make more detailed complex circuit in semiconductor process and is important for quality. However, obstacles were in the process of the facility itself, vibration, wear and tear, and product and process change and environmental impact are difficult...
It is crucial to prevent low yields in the semiconductor industry. Since many factors affect variation in yield and they are deeply related, preventing low yield is difficult. There have been substantial researches in the field of yield prediction. Many researchers had used statistical methods. Many studies have shown that artificial neural network (ANN) achieved better performance than traditional...
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