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Miniaturized complementary metal-oxide semiconductor (CMOS) capacitive sensors presented in this work are capable of providing sensitive detection in the sub-nM range for biosensing applications. A convenient post-CMOS fabrication process is proposed to make sub-μm interdigitated microelectrodes covered by inter-metal dielectric layer as the sensing interface. Capacitance change due to the electrode-analyte...
Interdigitated microelectrodes integrated with CMOS sensing circuitry are presented in this work for detection of the neurotransmitter dopamine and as an immunosensor with sensitivity enhanced by gold nanoparticles. Microelectrodes covered by the silicon dioxide layer are fabricated through a maskless post-CMOS process. Charged biomolecules bind to the functionalized oxide surface after immobilization,...
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