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We demonstrate dynamic displacement measurement with phase-modulated light. Auto calibration using deep phase modulation makes the measurement independent of driving conditions of the modulator. Displacement of several tens nm for more-than-1-MHz vibration is successfully measured.
We propose a measurement system for high-speed vibration displacement using an interferometer with triangle-wave phase modulation. Displacement less than ±45 nm by 1-MHz vibration is proved measurable within a standard deviation of 1.5 nm.
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