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Diamond-like carbon (DLC) films have been reliably deposited on YZ LiNbO 3, and surface acoustic wave (SAW) velocity change has been observed. These relatively thin films increase the SAW velocity sufficiently, and they can be used for SAW devices. The cut-off behavior was observed at approximately 538 MHz in a 2-μm-thick DLC film on the LiNbO 3 substrate.
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