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In this paper, a model characterizing hysteresis, creep, and dynamic effects is proposed for simulation and control system design of piezoactuator-based nano-positioning system. Fractional-order integrator is employed to characterize the creep behavior at low frequencies. Maxwell resistive capacitor (MRC) model is used to capture the rate-independent hysteresis lying in the electric domain between...
To improve the performance of piezo nano-positioning system, feedback controller is designed based on the linearized hysteresis-compensated model of piezoelectric actuator (PEA). Nonlinear hysteresis is compensated for using Maxwell resistive capacitor (MRC) model. Then, a linear system is identified with this hysteresis-compensated dynamics. Based on the identified linear model, a trajectory preshaping...
This paper deals with creep modeling and identification for the piezoelectric actuator (PEA). Creep is an essential phenomenon when a PEA operates over long periods of time. A fractional-order model is proposed by representing the PEA as resistocaptance, which is a novel approach. The simplified fractional-order PEA model results in a double-logarithmic creep. Identification methods for PEA parameters...
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