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This paper reports on the experimental study of the effects of volume scaling in aluminum nitride (AlN) nano plate resonators on quality factor. For the first time, we show that efficient piezoelectric transduction of a high frequency (∼ 1 GHz) lateral-extensional mode of vibration and a high quality factor approaching 900 can be achieved when the thickness of the AlN nano plate is scaled from 200...
This paper reports on an innovative chemical sensing mechanism based on the effective transduction of the analyte induced variations in the electrical conductivity of a graphene electrode employed to excite mechanical vibration in an Aluminum Nitride (AlN) piezoelectric nano plate resonator (NPR). We show that the use of a single atomic layer graphene as a virtually massless and strainless electrode...
This paper presents a high temperature resolution (994.5 µK/Hz1/2 in a 50 Hz measurement bandwidth) micro-calorimetric sensor based on a high frequency (134.5 MHz) Aluminum Nitride (AlN) nano-plate resonator (NPR) overlapped by a freestanding reaction chamber separated by a micro-scale air gap (∼50 µm). For the first time, the unique thermal detection capabilities of the AlN NPR technology are exploited...
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