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We developed a micro-TAS system that uses magnetic wires instead of the conventional beads as the carrier to improve reaction efficiency. Magnetic wire 2.0 mm×74 μm×20 μm was fabricated by wet etching. The wires were introduced into a droplet immersed in silicone oil, and they were manipulated by the magnetic force of a moving magnet. The wires were successfully bundled for transportation through...
We conducted an investigation to find a corrugation removal mechanism selectively by anisotropic wet etching to reduce a periodic corrugation, called "scalloping", formed on the sidewalls of microstructures by Deep Reactive Ion Etching (D-RIE). We analyzed the corrugation removal mechanism by using an etching distribution pattern, and then conducted several equations to predict the corrugation...
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