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A layered structure of aluminum nitride (AlN)/silicon dioxide (SiO2)/cubic silicon carbide with embedded electrodes, which enables the growth of high-quality AlN thin films, is proposed and studied. The phase velocity, coupling factor, and temperature coefficient of frequency (TCF) of surface acoustic waves in the proposed structure have been investigated using the finite-element method. The simulation...
A novel sandwich structure of AlN/SiO2/3C-SiC with embedded electrodes, which enables the growth of highly quality AlN thin films, is proposed and studied. The phase velocity, coupling factor, and temperature coefficient of frequency (TCF) of SAWs in the proposed structure have been investigated using the finite element method (FEM). The simulation results show that high velocity of 5,485m/s and large...
This paper describes drastic enhancement of Ke2 by mass loading in layered SAW device structures such as the ScAlN film/Si substrate. It is shown that this phenomenon is obvious even when an amorphous SiO2 film is deposited on the top surface for temperature compensation. This enhancement is caused by SAW energy confinement to the top surface of the ScAlN layer where the IDT is placed. This Ke2 enhancement...
In this paper, a 3D Finite Element model (FEM) of a surface acoustic wave (SAW) resonator consists of a piezoelectric thin film ScAlN /diamond layered structure with buried interdigital electrodes (IDT) was performed and analyzed using commercial software COMSOL Multiphysics, FEM software. We have done investigation on SAW propagation characteristics on the layered structures for different thickness...
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