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This study based on piezo-electric sensing principle to develop a high S/N ratio MEMS microphone. The patterned PZT and electrodes designed implemented above the clamped diaphragm to generate high stress concentration on PZT and Si bimorph diaphragm. The proposed central-circle electrode design can induce more charge than the edge-surrounded electrode design (served as the reference design). The proposed...
Lead forms elongated islands when grown on vicinal Si(111) surfaces. Polarized infrared transmittance studies have shown a strong anisotropic optical response associated with antenna‐like plasmonic resonances, whose spectral position in the region of 0.25 eV is sensitive to the length of the islands. Reflection anisotropy spectroscopy (RAS) using a photoelastic modulator (PEM) should be more sensitive...
This paper presents a 60GHz U shape antenna on chip by standard silicon technology. A novel capacitance-load structure is presented for the first time to improve the antenna's gain and radiation efficiency. The CPW structure is adopted for feedline. The simulated maximum gain was −0.7dBi, the radiation efficiency was 55%, and the VSWR was less than two from 54GHz to 65GHz. We also analyzed the effects...
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