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With the development of radio frequency wireless communication technology, there are strong demands of spiral inductor with high performance and low profile. The inductor is a basic component of IPD (Integrated Passive Devices [1]) including oscillators, filters, mixers and baluns. In this paper, the structure and process of fabricating a high performance wafer level silicon-base spiral inductor was...
A novel inductor model, which considers the magnetic and capacitive substrate coupling comprehensively, and a new fast approach for substrate network parameter extraction are presented in this paper. The introduction of substrate parasitic inductance (SPI) and the mutual inductance is based on the resonance characteristic of the measured substrate's Y-parameter and their physical meaning. A series...
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