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Titania thin films were prepared on bare Si and Pt/Ti/SiO 2 /Si substrates by chemical bath deposition (CBD) from solutions of a titanium peroxo complex and subsequent calcinations at 350 and 700 °C, respectively. The CBD process allowed deposition on both uncoated and metal-coated Si substrates with the same deposition rate. Optimization of the annealing process yielded uniform and crack-free...
Titania thin films were prepared on polyethylene terephthalate (PET) substrates by hydrolysis of a peroxo complex in aqueous solutions at 333 K. Dynamic light scattering was used to monitor the particle growth in the reaction solution at various pH values. These findings were used to optimize the microstructure of the titania films by avoiding sedimentation of agglomerates and rapid depletion of the...
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