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In this paper, the sensing mechanism of a novel capacitive nanometer sensor based on the time grating approach is investigated. A mathematical model of the sensor is established using electric field coupling theory and the area integral method, which indicates that the measured displacement of the object is proportional to the phase shift of the output signal. High frequency time pulses serve as the...
A highly stable motion with orthogonally alternating electric field is established to build the relationship between spatial displacement and time standards. Displacement is measured by counting the time pulses that serve as measurement standards. Thus, a displacement method is called time grating. An orthogonally alternating electric field is generated using two rows of differential capacitive sensing...
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