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The light-addressable potentiometric sensor (LAPS) is a chemical sensor based on the field effect in the electrolyte - insulator - semiconductor (EIS) structure. In the conventional LAPS, the ion concentration in the analyte solution is determined by measuring the amplitude of the photocurrent induced by illumination of a modulated light. In this study, we developed the phase-mode LAPS, in which the...
Infrared absorption spectroscopy (IRAS) in a multiple internal reflection (MIR) geometry is integrated with silicon-based micro-fluidic channels to allow detection and separation of DNA molecules in the micro-channels. The micro-channels were fabricated on a Si MIR-prism using the conventional silicon lithographic techniques. In the present method we can probe both solution-phase and surface-bound...
The direct calibration of MEMS springs made of single crystal silicon was carried out using a mechanical force measurement tool. The spring device for calibration fabricated from silicon on insulator (SOI) wafer contains four folded-beam springs. The spring constants of different-length devices were directly measured using electromagnetic force-feedback balance, whose force resolution was about 0...
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