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This paper presents a two-axis electrothermal single-crystal-silicon micromirror that is tilted 45° out of plane on a silicon optical bench (SiOB). The SiOB provides mechanical support and electrical wiring to the tilted two-axis scanning mirror, as well as aligned trenches for assembling other optical components, such as optical fibers and GRIN lens. The pre-set tilting of the mirror plate is achieved...
Beam structure is widely used for MEMS (Micro-electromechanical Systems) design, the mechanical properties of beam structure are of great importance to guide the design of MEMS devices. Among the many properties, stress rupture properties are studied in this paper. The sensor based on piezoresistive effect with a specially designed cross-beam structure is proposed for stress rupture properties measurement...
This paper presents a 2-axis electrothermal single-crystal-silicon (SCS) micromirror that is tilted 45° out of plane on a silicon optical bench (SiOB). The SiOB provides mechanical support and electrical wiring to the tilted 2-axis mirror as well as an aligned trench for assembling other optical components such as optical fibers. The tilt of the mirror is achieved with the bending of a set of stressed...
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