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We present the direct prototyping of three-dimensional (3D) micro supercapacitors using nanoporous carbon electrodes that are in-situ fabricated on chips. The approach successfully incorporates nano templating method into photolithography technology for the first time, so that functional electrodes are prepared from directly photopatterned precursor. Two preliminary prototypes with different electrode...
This paper presents the design, synthesis and characterization of nano-structured manganese dioxides (MnO2) and their composites as electrode materials for micro supercapacitors. An optimized composite containing nano-MnO2 powder exhibits a specific capacitance as high as 160F/g in 0.2M K2SO4 aqueous solution, and is compatible with micro fabrication process. Then a micro supercapacitor with 3D interdigital...
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