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The nonlinearities such as hysteresis and creep are the major factors inherent in PZT actuation that affect the tip positioning precision and manipulation performance of the AFM system. In this study, an extended PI model is generalized by introducing a creep model to the basic hysteretic operator of the PI model at the inflexion point of the hysteresis loop. Unified compensation for hysteresis and...
AFM has been proved to be a powerful nano-manipulation tool taking advantage of its ultra high resolution and precision. However the large spatial uncertainties associated with AFM tip positioning dual to the PZT nonlinearity and thermal drift are still challenging problems, which hinders its wide application especially in building complex structures In this paper, a probabilistic approach combined...
Nanomanipulation and nanoassembly using atom force microscopy (AFM) is a potential and promising technology for nanomanufacturing. Precise position of the tip of AFM is important to increase the accuracy and efficiency on fabricate complex nanostructures. However at the nano-scale, it is difficult to acquire the tip position expressed by the coordinate in real time due to PZT nonlinearity and thermal...
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