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The modification of mechanical properties of polyimide (PI) films by 2.0MeV Si ions irradiation was investigated by means of Hysitron TriboIndenter In Situ Nanomechanical Test System (Hysitron TriboIndenter). The results indicate that the elastic modulus and the hardness have remarkable increase with the increase of the fluence. The elastic modulus of the modified PI at the fluence of 1.25×10 ...
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