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Taking advantage of MEMS (micro electromechanical system) techniques, a microfabricated electrical impedance (EI) chip with microelectrodes was designed and fabricated. The microchip with Ti/Pt/Au detection microelectrodes and Su-8 sample reservoir was realized form glass substrate. The completed micro-electric impedance devices were characterized with NaCl solutions, cell culture solution RPMI1640...
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